WebFind out all of the information about the KLA - TENCOR product: optical inspection machine 29xx series . ... Using enhanced broadband plasma illumination technology, and the new pixel•point™ and nano•cell™ design-aware technologies, the 2950 and 2955 broadband plasma defect inspectors provide the sensitivity required to capture critical ... WebDec 21, 2024 · One such illumination source includes a laser-sustained plasma (LSP) source. LSP light sources are capable of producing high-power broadband light. Laser-sustained light sources operate by exciting a plasma target into a plasma state, which is capable of emitting light, using focused laser radiation.
High Power Laser-Sustained Plasma Lightsources for …
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WebMay 10, 2015 · High power laser-sustained plasma lightsources for KLA-Tencor broadband inspection tools. For the last 8 years, the brightness of UV lightsources in KT Broadband … WebLaser-sustained plasma (LSP) light sources are capable of producing high-power broadband light. Laser-sustained light sources operate by focusing laser radiation into a gas volume … WebMay 25, 2024 · in a plasma lamp of a laser - sustained plasma ( LSP ) broad band source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp . The illumination sources also include one or more sustaining lasers configured to sustain the plasma . The feed in tariff uk 2020